Inventor · disambiguated record
Anthony J. Toprac
Also filed as: TOPRAC ANTHONY · TOPRAC ANTHONY J · TOPRAC ANTHONY JOHN
77 granted patents·1 pending application·3,998 citations·filing 1994–2005
99Inventor score
Top patents by PatentIndex Score
78 records- 0198US6988017B2Adaptive sampling method for improved control in semiconductor manufacturingADVANCED MICRO DEVICES INC·Filed 2005·Granted Jan 17, 2006·122 cites·66 claims
- 0298US6387823B1Method and apparatus for controlling deposition process using residual gas analysisADVANCED MICRO DEVICES INC·Filed 2000·Granted May 14, 2002·290 cites·13 claims
- 0397US6540591B1Method and apparatus for post-polish thickness and uniformity controlFiled 2001·Granted Apr 1, 2003·100 cites·40 claims
- 0497US6442496B1Method and apparatus for dynamic sampling of a production lineADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 27, 2002·140 cites·38 claims
- 0597US6304999B1Method and apparatus for embedded process control framework in tool systemsADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 16, 2001·149 cites·23 claims
- 0696US6622059B1Automated process monitoring and analysis system for semiconductor processingADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 16, 2003·101 cites·44 claims
- 0796US6470230B1Supervisory method for determining optimal process targets based on product performance in microelectronic fabricationADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 22, 2002·119 cites·37 claims
- 0896US6346426B1Method and apparatus for characterizing semiconductor device performance variations based on independent critical dimension measurementsADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 12, 2002·110 cites·41 claims
- 0996US6245581B1Method and apparatus for control of critical dimension using feedback etch controlADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 12, 2001·204 cites·26 claims
- 1096US5926690ARun-to-run control process for controlling critical dimensionsADVANCED MICRO DEVICES INC·Filed 1997·Granted Jul 20, 1999·346 cites·20 claims
- 1195US6529789B1Method and apparatus for automatic routing for reentrant processesADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 4, 2003·95 cites·11 claims
- 1294US6410351B1Method and apparatus for modeling thickness profiles and controlling subsequent etch processADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 25, 2002·78 cites·18 claims
- 1394US6238937B1Determining endpoint in etching processes using principal components analysis of optical emission spectra with thresholdingADVANCED MICRO DEVICES INC·Filed 2000·Granted May 29, 2001·70 cites·42 claims
- 1494US6230069B1System and method for controlling the manufacture of discrete parts in semiconductor fabrication using model predictive controlADVANCED MICRO DEVICES INC·Filed 1998·Granted May 8, 2001·162 cites·41 claims
- 1593US6675137B1Method of data compression using principal components analysisADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 6, 2004·50 cites·40 claims
- 1693US6379980B1Method and apparatus for monitoring material removal tool performance using endpoint time removal rate determinationADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 30, 2002·65 cites·37 claims
- 1793US6368883B1Method for identifying and controlling impact of ambient conditions on photolithography processesADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 9, 2002·117 cites·33 claims
- 1892US6643557B1Method and apparatus for using scatterometry to perform feedback and feed-forward controlADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 4, 2003·58 cites·29 claims
- 1992US6564114B1Determining endpoint in etching processes using real-time principal components analysis of optical emission spectraADVANCED MICRO DEVICES INC·Filed 2000·Granted May 13, 2003·49 cites·47 claims
- 2092US6316302B1Isotropically etching sidewall spacers to be used for both an NMOS source/drain implant and a PMOS LDD implantADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 13, 2001·57 cites·21 claims
- 2191US6802045B1Method and apparatus for incorporating control simulation environmentADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 5, 2004·56 cites·31 claims
- 2291US6582618B1Method of determining etch endpoint using principal components analysis of optical emission spectraADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 24, 2003·60 cites·20 claims
- 2391US6405144B1Method and apparatus for programmed latency for improving wafer-to-wafer uniformityADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 11, 2002·62 cites·52 claims
- 2490US6405096B1Method and apparatus for run-to-run controlling of overlay registrationADVANCED MICRO DEVICES INC·Filed 1999·Granted Jun 11, 2002·93 cites·39 claims
- 2590US6368879B1Process control with control signal derived from metrology of a repetitive critical dimension feature of a test structure on the work pieceADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 9, 2002·100 cites·20 claims
- 2690US6133132AMethod for controlling transistor spacer widthADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 17, 2000·46 cites·15 claims
- 2789US6460002B1Method and apparatus for data stackification for run-to-run controlADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 1, 2002·37 cites·31 claims
- 2888US6419846B1Determining endpoint in etching processes using principal components analysis of optical emission spectraADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 16, 2002·32 cites·42 claims
- 2988US6360133B1Method and apparatus for automatic routing for reentrant processADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 19, 2002·82 cites·31 claims
- 3086US6741903B1Method for relating photolithography overlay target damage and chemical mechanical planarization (CMP) fault detection to CMP tool indentificationADAVANCED MICRO DEVICES INC·Filed 2000·Granted May 25, 2004·31 cites·36 claims
- 3186US6725121B1Method and apparatus for using a dynamic control model to compensate for a process interruptADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 20, 2004·24 cites·31 claims
- 3285US6535774B1Incorporation of critical dimension measurements as disturbances to lithography overlay run to run controllerADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 18, 2003·68 cites·26 claims
- 3384US6427093B1Method and apparatus for optimal wafer-by-wafer processingADVANCED MICRO DEVICES INC·Filed 1999·Granted Jul 30, 2002·67 cites·41 claims
- 3483US6365422B1Automated variation of stepper exposure dose based upon across wafer variations in device characteristics, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 2, 2002·25 cites·22 claims
- 3582US7103439B1Method and apparatus for initializing tool controllers based on tool event dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 5, 2006·19 cites·28 claims
- 3681US6706541B1Method and apparatus for controlling wafer uniformity using spatially resolved sensorsADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 16, 2004·35 cites·20 claims
- 3781US6615098B1Method and apparatus for controlling a tool using a baseline control scriptADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 2, 2003·30 cites·34 claims
- 3881US6595830B1Method of controlling chemical mechanical polishing operations to control erosion of insulating materialsADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 22, 2003·26 cites·26 claims
- 3981US6511898B1Method for controlling deposition parameters based on polysilicon grain size feedbackADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 28, 2003·25 cites·10 claims
- 4080US6937914B1Method and apparatus for controlling process target values based on manufacturing metricsADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 30, 2005·16 cites·48 claims
- 4180US6789052B1Method of using control models for data compressionADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 7, 2004·24 cites·48 claims
- 4280US6528331B1Method for identifying and controlling impact of ambient conditions on photolithography processesADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 4, 2003·19 cites·10 claims
- 4380US6409879B1System for controlling transistor spacer widthADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 25, 2002·21 cites·11 claims
- 4479US6124610AIsotropically etching sidewall spacers to be used for both an NMOS source/drain implant and a PMOS LDD implantADVANCED MICRO DEVICES INC·Filed 1998·Granted Sep 26, 2000·37 cites·16 claims
- 4578US6785586B1Method and apparatus for adaptively scheduling tool maintenanceADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 31, 2004·23 cites·23 claims
- 4678US6699727B1Method for prioritizing production lots based on grade estimates and output requirementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 2, 2004·21 cites·26 claims
- 4778US6560503B1Method and apparatus for monitoring controller performance using statistical process controlADVANCED MICRO DEVICES INC·Filed 1999·Granted May 6, 2003·59 cites·36 claims
- 4877USRE39518ERun to run control process for controlling critical dimensionsADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 13, 2007·19 cites·104 claims
- 4977US6560506B2Method and apparatus for control for semiconductor processing for reducing effects of environmental effectsADVANCED MICRO DEVICES INC·Filed 2000·Granted May 6, 2003·18 cites·29 claims
- 5077US6532428B1Method and apparatus for automatic calibration of critical dimension metrology toolADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 11, 2003·47 cites·41 claims
Showing the top 50 of 78 patent records by PatentIndex Score.
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