Inventor · disambiguated record
Vasil Vorsa
Also filed as: VORSA VASIL
4 granted patents·9 pending applications·4 citations·filing 2006–2022
62Inventor score
Top patents by PatentIndex Score
13 records- 0178US8431419B2UV absorption based monitor and control of chloride gas streamBERTRAM JR RONALD THOMAS·Filed 2009·Granted Apr 30, 2013·3 cites·15 claims
- 0270US11421319B2Plasma etch-resistant film and a method for its fabricationBENEQ OY·Filed 2020·Granted Aug 23, 2022·0 cites·9 claims
- 0364US10961620B2Plasma etch-resistant film and a method for its fabricationBENEQ OY·Filed 2017·Granted Mar 30, 2021·0 cites·25 claims
- 0460US2013277332A1Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substrates and Related MethodsGREENE TWEED INC·Filed 2013·Application pending·0 cites
- 0557US2010180913A1Methods for in-situ chamber cleaning process for high volume manufacture of semiconductor materialsARENA CHANTAL·Filed 2008·Application pending·0 cites
- 0656US8580993B2Amino vinylsilane precursors for stressed SiN filmsVORSA VASIL·Filed 2009·Granted Nov 12, 2013·1 cites·3 claims
- 0756US2012103519A1Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substrates and Related MethodsAHEEM MOHAMMED·Filed 2011·Application pending·0 cites
- 0853US2023044068A1Plasma Resistant YxHfyOz Homogeneous Films and Methods of Film ProductionGREENE TWEED TECH INC·Filed 2022·Application pending·0 cites
- 0950US2014065844A1Amino Vinylsilane Precursors for Stressed SiN FilmsAIR PROD & CHEM·Filed 2013·Application pending·0 cites
- 1049US2020131632A1Plasma Resistant Multi-Layer Coatings and Related Methods of Preparing SameGREENE TWEED TECH INC·Filed 2019·Application pending·0 cites
- 1149US2022098735A1Mixed substantially homogenous coatings deposited by aldGREENE TWEED TECH INC·Filed 2021·Application pending·0 cites
- 1239US2008142046A1Thermal F2 etch process for cleaning CVD chambersJOHNSON ANDREW DAVID·Filed 2006·Application pending·0 cites
- 1336US2014099491A1Plasma Etch Resistant Films, Articles Bearing Plasma Etch Resistant Films and Related MethodsAMEEN MOHAMMED·Filed 2012·Application pending·0 cites
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