Inventor · disambiguated record
Robert Gruenberger
Also filed as: GRUENBERGER ROBERT
9 granted patents·23 citations·filing 2008–2020
82Inventor score
Top patents by PatentIndex Score
9 records- 0186US7889030B2Passive temperature compensation of silicon MEMS devicesINFINEON TECHNOLOGIES AG·Filed 2008·Granted Feb 15, 2011·16 cites·25 claims
- 0284US10899604B2Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel packageINFINEON TECHNOLOGIES AG·Filed 2019·Granted Jan 26, 2021·3 cites·10 claims
- 0374US8318581B2Micro-electromechanical system devicesMUELLER KARL-HEINZ·Filed 2011·Granted Nov 27, 2012·2 cites·10 claims
- 0467US11505450B2Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel packageINFINEON TECHNOLOGIES AG·Filed 2020·Granted Nov 22, 2022·0 cites·9 claims
- 0562US11247895B2Segmented stress decoupling via frontside trenchingINFINEON TECHNOLOGIES AG·Filed 2020·Granted Feb 15, 2022·0 cites·17 claims
- 0662US8125046B2Micro-electromechanical system devicesMUELLER KARL-HEINZ·Filed 2008·Granted Feb 28, 2012·2 cites·28 claims
- 0757US10807862B1Segmented stress decoupling via frontside trenchingINFINEON TECHNOLOGIES AG·Filed 2019·Granted Oct 20, 2020·0 cites·17 claims
- 0857US8993394B2Micro-electromechanical system devicesINFINEON TECHNOLOGIES AG·Filed 2012·Granted Mar 31, 2015·0 cites·12 claims
- 0945US10843916B2Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-fillingINFINEON TECHNOLOGIES AG·Filed 2019·Granted Nov 24, 2020·0 cites·19 claims
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