Inventor · disambiguated record
Michael Heiden
Also filed as: HEIDEN MICHAEL · HEIDEN MICHAEL ALLEN
23 granted patents·16 pending applications·67 citations·filing 2006–2012
93Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH25HEIDEN MICHAEL7HEIDEN MICHAEL ALLEN2LEICA MICROSYSTEMS2BOESSER HANS-ARTUR1
Top patents by PatentIndex Score
39 records- 0183US7903259B2Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 8, 2011·5 cites·22 claims
- 0277US7694426B2Method for eliminating sources of error in the system correction of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Apr 13, 2010·9 cites·10 claims
- 0374US8305587B2Apparatus for the optical inspection of wafersHEIDEN MICHAEL·Filed 2010·Granted Nov 6, 2012·4 cites·15 claims
- 0473US7382450B2Method of detecting an edge bead removal line on a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jun 3, 2008·4 cites·9 claims
- 0570US8582113B2Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the deviceHEIDEN MICHAEL·Filed 2012·Granted Nov 12, 2013·3 cites·33 claims
- 0667US7545489B2Apparatus and method of inspecting the surface of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jun 9, 2009·2 cites·14 claims
- 0762US8390927B2Element for homogenizing the illumination with simultaneous setting of the polarization degreeHEIDEN MICHAEL·Filed 2008·Granted Mar 5, 2013·3 cites·4 claims
- 0862USD627029SArrow restHEIDEN MICHAEL ALLEN·Filed 2010·Granted Nov 9, 2010·13 cites·1 claims
- 0962US7654007B2Method for improving the reproducibility of a coordinate measuring apparatus and its accuracyVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Feb 2, 2010·4 cites·12 claims
- 1062US7602824B2Device and method for supplying short-wavelength lightLEICA MICROSYSTEMS·Filed 2006·Granted Oct 13, 2009·1 cites·7 claims
- 1156USD644289SDecorative deerskin arrowheadHEIDEN MICHAEL ALLEN·Filed 2010·Granted Aug 30, 2011·10 cites·1 claims
- 1256US7889338B2Coordinate measuring machine and method for structured illumination of substratesVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Feb 15, 2011·2 cites·15 claims
- 1356US7769556B2Method for correcting measuring errors caused by the lens distortion of an objectiveVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Aug 3, 2010·2 cites·8 claims
- 1455US7986409B2Method for determining the centrality of masksVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 26, 2011·2 cites·14 claims
- 1555US7680616B2Method for correcting an error of the imaging system of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 16, 2010·2 cites·9 claims
- 1651US7939789B2Method for reproducibly determining geometrical and/or optical object characteristicsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted May 10, 2011·0 cites·15 claims
- 1748US2012033691A1Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the DeviceHEIDEN MICHAEL·Filed 2011·Application pending·0 cites
- 1848US2012033230A1Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the DeviceHEIDEN MICHAEL·Filed 2011·Application pending·0 cites
- 1947US7978340B2System and method for determining positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 12, 2011·1 cites·7 claims
- 2047US7961334B2Coordinate measuring machine for measuring structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 14, 2011·0 cites·5 claims
- 2146US2010060883A1Apparatus and method for determining the focus positionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Application pending·0 cites
- 2246US2009279080A1Device and method for the inspection of defects on the edge region of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Application pending·0 cites
- 2346US2007035850A1Method and device for reducing systematic measuring errors in the examination of objectsLEICA MICROSYSTEMS·Filed 2006·Application pending·0 cites
- 2445US2006279729A1Method of inspecting semiconductor wafers taking the SAW design into accountVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 2543US2006286811A1Method of optically imaging and inspecting a wafer in the context of edge bead removalVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 2643US2006262295A1Apparatus and method for inspecting a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 2742US7929149B2Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Apr 19, 2011·0 cites·11 claims
- 2842US7561263B2Apparatus for illuminating and inspecting a surfaceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jul 14, 2009·0 cites·15 claims
- 2941US8102541B2Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structuresHEIDEN MICHAEL·Filed 2008·Granted Jan 24, 2012·0 cites·23 claims
- 3041US2009073458A1Means and method for determining the spatial position of moving elements of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 3141US2009051932A1Method for determining the position of a measurement objective in the z-coordinate direction of an optical measuring machine having maximum reproducibility of measured structure widthsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 3240US8154595B2Device and method for automatic detection of incorrect measurements by means of quality factorsBOESSER HANS-ARTUR·Filed 2008·Granted Apr 10, 2012·0 cites·21 claims
- 3339US2009225414A1Dark Field Objective for a MicroscopeHEIDEN MICHAEL·Filed 2006·Application pending·0 cites
- 3439US2007046949A1Coordinate measuring deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 3538US2008031509A1Apparatus and method for measuring the height profile of a structured substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 3638US2009015833A1Device and method for improving the measurement accuracy in an optical cd measurement systemVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 3737US2006274934A1Apparatus and method for improving measuring accuracy in the determination of structural dataVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 3835US7864319B2Device and method for determining an optical property of a maskVISTEC SEMICONDUCTOR SYSTEM GMBH·Filed 2008·Granted Jan 4, 2011·0 cites·15 claims
- 3928US2009066970A1Arrangement and method for improving the measurement accuracy in the nm range for optical systemsMUETEC AUTOMATISIERTE MIKROSKO·Filed 2008·Application pending·0 cites
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