Inventor · disambiguated record
Sadao Hirae
Also filed as: HIRAE SADAO
19 granted patents·7 pending applications·448 citations·filing 1991–2009
96Inventor score
Files withDAINIPPON SCREEN MFG26
Top patents by PatentIndex Score
26 records- 0194US6729561B2Cleaning nozzle and substrate cleaning apparatusDAINIPPON SCREEN MFG·Filed 2001·Granted May 4, 2004·93 cites·23 claims
- 0285US6705331B2Substrate cleaning apparatusDAINIPPON SCREEN MFG·Filed 2001·Granted Mar 16, 2004·29 cites·4 claims
- 0385US6598805B2Substrate cleaning apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted Jul 29, 2003·33 cites·11 claims
- 0484US6901938B2Substrate cleaning apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Jun 7, 2005·27 cites·14 claims
- 0583US6951221B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2001·Granted Oct 4, 2005·22 cites·10 claims
- 0678US7479205B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Jan 20, 2009·23 cites·7 claims
- 0775US5857474AMethod of and apparatus for washing a substrateDAINIPPON SCREEN MFG·Filed 1996·Granted Jan 12, 1999·45 cites·20 claims
- 0869US5239183AOptical gap measuring device using frustrated internal reflectionDAINIPPON SCREEN MFG·Filed 1992·Granted Aug 24, 1993·28 cites·14 claims
- 0968US7600522B2Substrate treatment method and substrate treatment apparatusDAINIPPON SCREEN MFG·Filed 2009·Granted Oct 13, 2009·2 cites·15 claims
- 1066US7267130B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Sep 11, 2007·7 cites·1 claims
- 1165US5225690AGap measuring device and method using frustrated internal reflectionDAINIPPON SCREEN MFG·Filed 1991·Granted Jul 6, 1993·25 cites·58 claims
- 1262US5314831AMethod of and apparatus for evaluating crystal rate in silicon thin filmDAINIPPON SCREEN MFG·Filed 1992·Granted May 24, 1994·35 cites·11 claims
- 1358US5568252AMethod and apparatus for measuring insulation film thickness of semiconductor waferDAINIPPON SCREEN MFG·Filed 1994·Granted Oct 22, 1996·30 cites·12 claims
- 1450US5554939ANon-destructive measuring sensor for semiconductor wafer and method of manufacturing the sameDAINIPPON SCREEN MFG·Filed 1993·Granted Sep 10, 1996·14 cites·12 claims
- 1550US5475319AMethod of measuring electric charge of semiconductor waferDAINIPPON SCREEN MFG·Filed 1994·Granted Dec 12, 1995·20 cites·10 claims
- 1648US7428907B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Sep 30, 2008·1 cites·19 claims
- 1744US2004206379A1Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
- 1843US2004235308A1Substrate treatment method and sustrate treatment apparatusDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
- 1942US5444389AMethod and apparatus for measuring lifetime of minority carriers in semiconductorDAINIPPON SCREEN MFG·Filed 1993·Granted Aug 22, 1995·9 cites·14 claims
- 2042US2006191556A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 2141US2005229946A1Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 2238US2003178047A1Substrate processing apparatus and substrate cleaning methodDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
- 2338US2004003829A1Substrate cleaning apparatus and substrate cleaning methodDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
- 2436US2001001392A1Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2000·Application pending·0 cites
- 2532US6278267B1Method of determining impurity content and apparatus for the sameDAINIPPON SCREEN MFG·Filed 1998·Granted Aug 21, 2001·3 cites·7 claims
- 2631US5504437AApparatus and method for electrical measurement of semiconductor wafersDAINIPPON SCREEN MFG·Filed 1995·Granted Apr 2, 1996·2 cites·25 claims
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