Inventor · disambiguated record
Osamu Yokokawa
Also filed as: YOKOKAWA OSAMU
5 granted patents·417 citations·filing 1989–1994
85Inventor score
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5 records- 0193US5328360AHeat-treating apparatusTOKYO ELECTION SAGAMI KABUSHIK·Filed 1993·Granted Jul 12, 1994·292 cites·4 claims
- 0275US5271732AHeat-treating apparatusTEL SAGAMI LTD·Filed 1992·Granted Dec 21, 1993·24 cites·4 claims
- 0373US5422081ATrap device for vapor phase reaction apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Jun 6, 1995·41 cites·17 claims
- 0471US5016567AApparatus for treatment using gasTEL SAGAMI LTD·Filed 1989·Granted May 21, 1991·29 cites·7 claims
- 0555US5506389AThermal processing furnace and fabrication method thereofTOKYO ELECTRON LTD·Filed 1994·Granted Apr 9, 1996·31 cites·20 claims
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