Inventor · disambiguated record
Heehwan Kim
Also filed as: KIM HEEHWAN
9 granted patents·6 pending applications·19 citations·filing 2008–2020
80Inventor score
Files withSEMES CO LTD10KIM CHOONSOOK1SAMSUNG ELECTRONICS CO LTD1UNIV KYUNG HEE UNIV IND COOP GROUP1UNIV-INDUSTRY COOP FOUND OF KYUNG HEE UNIV1
Top patents by PatentIndex Score
15 records- 0193US10109506B2Unit for supplying fluid, apparatus and method for treating substrate with the unitSEMES CO LTD·Filed 2017·Granted Oct 23, 2018·13 cites·10 claims
- 0280US11424139B2Apparatus and method for treating substrate, and nozzle unitSEMES CO LTD·Filed 2020·Granted Aug 23, 2022·1 cites·17 claims
- 0374US10825699B2Standby port and substrate processing apparatus having the sameSEMES CO LTD·Filed 2018·Granted Nov 3, 2020·2 cites·8 claims
- 0469US10304687B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2017·Granted May 28, 2019·1 cites·9 claims
- 0557US9802150B2Carbon dioxide absorbent based on amine having nitrile functional group, and carbon dioxide absorption method and separation method using sameUNIV-INDUSTRY COOP FOUND OF KYUNG HEE UNIV·Filed 2013·Granted Oct 31, 2017·2 cites·11 claims
- 0652US2020406311A1Apparatus and method for treating a substrateSEMES CO LTD·Filed 2020·Application pending·0 cites
- 0751US11981995B2Chemical supply apparatus, method for removing particles from chemical, nozzle unit, and substrate treating apparatusSEMES CO LTD·Filed 2020·Granted May 14, 2024·0 cites·15 claims
- 0849US11280753B2Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensorSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 22, 2022·0 cites·20 claims
- 0946US2009128531A1Plasma display device and driving method thereofKIM CHOONSOOK·Filed 2008·Application pending·0 cites
- 1043US8927763B2Method for preparing aliphatic diisocyanateUNIV KYUNG HEE UNIV IND COOP GROUP·Filed 2012·Granted Jan 6, 2015·0 cites·11 claims
- 1142US2017312794A1Apparatus and method for treating a substrateSEMES CO LTD·Filed 2017·Application pending·0 cites
- 1241US2021066099A1Apparatus and method for processing substrateSEMES CO LTD·Filed 2020·Application pending·0 cites
- 1340US10707101B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2017·Granted Jul 7, 2020·0 cites·17 claims
- 1438US2017225118A1Carbon dioxide absorbent comprising oxygen-containing diamineUNIV-INDUSTRY COOP GROUP OF KYUNG HEE UNIV·Filed 2015·Application pending·0 cites
- 1537US2018033655A1Apparatus and method for treating substrateSEMES CO LTD·Filed 2017·Application pending·0 cites
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