Inventor · disambiguated record
Byungsun Bang
Also filed as: BANG BYUNGSUN
7 granted patents·3 pending applications·6 citations·filing 2016–2020
73Inventor score
Technology areasH10P
Files withSEMES CO LTD10
Top patents by PatentIndex Score
10 records- 0183US11765793B2Substrate treating apparatusSEMES CO LTD·Filed 2020·Granted Sep 19, 2023·2 cites·20 claims
- 0274US10825699B2Standby port and substrate processing apparatus having the sameSEMES CO LTD·Filed 2018·Granted Nov 3, 2020·2 cites·8 claims
- 0374US10758875B2Liquid supply unit, substrate treating apparatus, and method for removing bubblesSEMES CO LTD·Filed 2017·Granted Sep 1, 2020·2 cites·14 claims
- 0448US12278121B2Support unit, substrate treating apparatus including the same, and substrate treating methodSEMES CO LTD·Filed 2020·Granted Apr 15, 2025·0 cites·21 claims
- 0542US11745291B2Apparatus and method for processing substrateSEMES CO LTD·Filed 2020·Granted Sep 5, 2023·0 cites·8 claims
- 0642US2021066077A1Apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Application pending·0 cites
- 0741US11000879B2Method and apparatus for treating substrateSEMES CO LTD·Filed 2017·Granted May 11, 2021·0 cites·5 claims
- 0841US2021066099A1Apparatus and method for processing substrateSEMES CO LTD·Filed 2020·Application pending·0 cites
- 0936US2018337070A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Application pending·0 cites
- 1032US10453672B2Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrateSEMES CO LTD·Filed 2016·Granted Oct 22, 2019·0 cites·6 claims
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