Inventor · disambiguated record
Hyeong Seop Shin
Also filed as: SHIN HYEONG SEOP
2 granted patents·31 citations·filing 2017–2018
63Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0196US9978605B2Method of forming low resistivity fluorine free tungsten film without nucleationLAM RES CORP·Filed 2017·Granted May 22, 2018·23 cites·23 claims
- 0292US10546751B2Forming low resistivity fluorine free tungsten film without nucleationLAM RES CORP·Filed 2018·Granted Jan 28, 2020·8 cites·19 claims
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