Inventor · disambiguated record
Sander Christiaan Broers
Also filed as: BROERS SANDER C · BROERS SANDER CHRISTIAAN
9 granted patents·1 pending application·7 citations·filing 2005–2015
79Inventor score
Top patents by PatentIndex Score
10 records- 0173US7604359B2High positioning reproducible low torque mirror-actuator interfaceZEISS CARL SMT AG·Filed 2005·Granted Oct 20, 2009·3 cites·17 claims
- 0265US8980025B2Method and apparatus for laminating a first and a second sheetVAN DEN BRAND JEROEN·Filed 2010·Granted Mar 17, 2015·1 cites·15 claims
- 0362US9389518B2Stage system and a lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted Jul 12, 2016·1 cites·20 claims
- 0458US8256912B2High positioning reproducible low torque mirror-actuator interfaceSOEMERS HERMAN M J R·Filed 2011·Granted Sep 4, 2012·1 cites·20 claims
- 0554US7699480B2High positioning reproducible low torque mirror-actuator interfaceZEISS CARL SMT AG·Filed 2008·Granted Apr 20, 2010·0 cites·9 claims
- 0653US9174425B2Apparatus and method for laminating a first and a second sheetVAN DEN BRAND JEROEN·Filed 2010·Granted Nov 3, 2015·1 cites·5 claims
- 0748US9921494B2Lithographic apparatus comprising an actuator, and method for protecting such actuatorASML NETHERLANDS BV·Filed 2013·Granted Mar 20, 2018·0 cites·13 claims
- 0848US2010149671A1High positioning reproducible low torque mirror - actuator interfaceZEISS CARL SMT AG·Filed 2010·Application pending·0 cites
- 0943US9910367B2Lithographic apparatus, method for positioning an object in a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 6, 2018·0 cites·20 claims
- 1036US10061213B2Sensor, object positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Aug 28, 2018·0 cites·20 claims
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