Inventor · disambiguated record
Kazuo Nakahara
Also filed as: NAKAHARA KAZUO
13 granted patents·2 pending applications·24 citations·filing 2010–2016
87Inventor score
Top patents by PatentIndex Score
15 records- 0187US8273521B2Radiation-sensitive resin composition and compoundSATO MITSUO·Filed 2010·Granted Sep 25, 2012·7 cites·10 claims
- 0284US8927201B2Multilayer resist process pattern-forming method and multilayer resist process inorganic film-forming compositionJSR CORP·Filed 2013·Granted Jan 6, 2015·4 cites·18 claims
- 0382US8728706B2Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compoundASANO YUUSUKE·Filed 2012·Granted May 20, 2014·4 cites·7 claims
- 0478US9513548B2Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compoundJSR CORP·Filed 2014·Granted Dec 6, 2016·2 cites·12 claims
- 0572US9304393B2Radiation-sensitive resin composition and compoundJSR CORP·Filed 2013·Granted Apr 5, 2016·1 cites·11 claims
- 0669US8609318B2Radiation-sensitive resin composition, method for forming resist pattern and polymerNAKAHARA KAZUO·Filed 2011·Granted Dec 17, 2013·2 cites·7 claims
- 0767US9323146B2Photoresist composition, resist pattern-forming method, compound, acid generating agent, and photodegradable baseJSR CORP·Filed 2014·Granted Apr 26, 2016·1 cites·18 claims
- 0865US8647810B2Resist lower layer film-forming composition, polymer, resist lower layer film, pattern-forming method, and method of producing semiconductor deviceNAKAHARA KAZUO·Filed 2011·Granted Feb 11, 2014·1 cites·12 claims
- 0965US8603726B2Radiation-sensitive resin composition, polymer and compoundNAKAHARA KAZUO·Filed 2011·Granted Dec 10, 2013·1 cites·11 claims
- 1063US8697335B2Radiation-sensitive resin composition and compoundNAKAHARA KAZUO·Filed 2012·Granted Apr 15, 2014·1 cites·7 claims
- 1156US10048586B2Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compoundJSR CORP·Filed 2016·Granted Aug 14, 2018·0 cites·19 claims
- 1253US8609321B2Radiation-sensitive resin composition, polymer and compoundJSR CORP·Filed 2013·Granted Dec 17, 2013·0 cites·5 claims
- 1341US8895223B2Radiation-sensitive resin compositionSATO MITSUO·Filed 2012·Granted Nov 25, 2014·0 cites·4 claims
- 1441US2013045446A1Radiation-sensitive resin composition, method for forming a resist pattern and sulfonium compoundJSR CORP·Filed 2012·Application pending·0 cites
- 1540US2013095428A1Radiation-sensitive resin compositionJSR CORP·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →