Inventor · disambiguated record
Alexei Maznev
Also filed as: MAZNEV ALEXEI
6 granted patents·3 pending applications·92 citations·filing 1998–2017
80Inventor score
Files withADVANCED METROLOGY SYSTEMS LLC4MAZNEV ALEXEI3ACTIVE IMPULSE SYSTEMS INC1KONINKL PHILIPS ELECTRONICS NV1
Top patents by PatentIndex Score
9 records- 0183US6069703AMethod and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structureACTIVE IMPULSE SYSTEMS INC·Filed 1998·Granted May 30, 2000·69 cites·38 claims
- 0273US7327468B2Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin filmsADVANCED METROLOGY SYSTEMS LLC·Filed 2002·Granted Feb 5, 2008·17 cites·41 claims
- 0361US10241058B2Systems and methods for quality control of a periodic structureMAZNEV ALEXEI·Filed 2017·Granted Mar 26, 2019·1 cites·16 claims
- 0456US7499183B2Method of measuring sub-micron trench structuresADVANCED METROLOGY SYSTEMS LLC·Filed 2004·Granted Mar 3, 2009·3 cites·17 claims
- 0556US7365864B2Method of determining properties of patterned thin film metal structures using transient thermal responseADVANCED METROLOGY SYSTEMS LLC·Filed 2003·Granted Apr 29, 2008·2 cites·30 claims
- 0644US2007109540A1Method for measuring thin filmsKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 0737US7839509B2Method of measuring deep trenches with model-based optical spectroscopyADVANCED METROLOGY SYSTEMS LLC·Filed 2006·Granted Nov 23, 2010·0 cites·31 claims
- 0837US2008049214A1Measuring Diffractive Structures By Parameterizing Spectral FeaturesMAZNEV ALEXEI·Filed 2007·Application pending·0 cites
- 0929US2007024871A1Method and apparatus for measuring thickness of thin films via transient thermoreflectanceMAZNEV ALEXEI·Filed 2003·Application pending·0 cites
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