Inventor · disambiguated record
Robbert Edgar Van Leeuwen
Also filed as: VAN LEEUWEN ROBBERT EDGAR
14 granted patents·35 citations·filing 2004–2019
88Inventor score
Files withASML NETHERLANDS BV9EUSSEN EMIEL JOZEF MELANIE1GEORGE RICHARD ALEXANDER1HUANG YANG-SHAN1KOENEN WILLEM HERMAN GERTRUDA ANNA1
Top patents by PatentIndex Score
14 records- 0188US7576834B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Aug 18, 2009·7 cites·26 claims
- 0285US7385675B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·18 cites·29 claims
- 0377US11999645B2Optical fibers and production methods thereforASML NETHERLANDS BV·Filed 2019·Granted Jun 4, 2024·1 cites·21 claims
- 0475US8675175B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 18, 2014·1 cites·15 claims
- 0569US9329501B2Lithographic apparatus, method of deforming a substrate table and device manufacturing methodHUANG YANG-SHAN·Filed 2012·Granted May 3, 2016·2 cites·19 claims
- 0668US8395755B2Lithographic apparatus and device manufacturing methodGEORGE RICHARD ALEXANDER·Filed 2009·Granted Mar 12, 2013·2 cites·16 claims
- 0767US8922756B2Position measurement system, lithographic apparatus and device manufacturing methodKOENEN WILLEM HERMAN GERTRUDA ANNA·Filed 2012·Granted Dec 30, 2014·2 cites·20 claims
- 0856US8614783B2Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement systemEUSSEN EMIEL JOZEF MELANIE·Filed 2009·Granted Dec 24, 2013·2 cites·34 claims
- 0954US9915880B2Stage apparatus, lithographic apparatus and method of positioning an object tableASML NETHERLANDS BV·Filed 2016·Granted Mar 13, 2018·0 cites·21 claims
- 1052US10338483B2Actuator system and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jul 2, 2019·0 cites·20 claims
- 1151US9316928B2Stage apparatus, lithographic apparatus and method of positioning an object tableVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2011·Granted Apr 19, 2016·0 cites·21 claims
- 1246US10331045B2Position measurement system and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jun 25, 2019·0 cites·20 claims
- 1340US10289011B2Position measurement system, interferometer and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 14, 2019·0 cites·20 claims
- 1435US7280228B2System and method of measurement, system and method of alignment, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Oct 9, 2007·0 cites·26 claims
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