Inventor · disambiguated record
Yuichi Mikata
Also filed as: MIKATA YUICHI
8 granted patents·997 citations·filing 1991–2003
91Inventor score
Top patents by PatentIndex Score
8 records- 0198US5484484AThermal processing method and apparatus thereforTOKYO ELECTRON LTD·Filed 1994·Granted Jan 16, 1996·513 cites·4 claims
- 0296US5252133AVertically oriented CVD apparatus including gas inlet tube having gas injection holesTOSHIBA KK·Filed 1991·Granted Oct 12, 1993·313 cites·10 claims
- 0385US5750436AThermal processing method and apparatus thereforTOKYO ELECTRON LTD·Filed 1995·Granted May 12, 1998·61 cites·6 claims
- 0472US5893760AMethod of heat treating a semiconductor wafer to reduce stressTOSHIBA KK·Filed 1997·Granted Apr 13, 1999·36 cites·20 claims
- 0568US6188838B1Apparatus for heat treating a semiconductor wafer to reduce stressTOSHIBA KK·Filed 1999·Granted Feb 13, 2001·29 cites·11 claims
- 0667US6211081B1Method of manufacturing a semiconductor device in a CVD reactive chamberTOSHIBA KK·Filed 1997·Granted Apr 3, 2001·32 cites·8 claims
- 0766US6383897B2Apparatus for manufacturing a semiconductor device in a CVD reactive chamberTOSHIBA KK·Filed 2001·Granted May 7, 2002·10 cites·12 claims
- 0850US7344805B2Mask and method for producing thereof and a semiconductor device using the sameROHM CO LTD·Filed 2003·Granted Mar 18, 2008·3 cites·25 claims
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