Inventor · disambiguated record
Shau-Tsung Yu
Also filed as: YU SHAU-TSUNG
5 granted patents·154 citations·filing 1996–2004
81Inventor score
Top patents by PatentIndex Score
5 records- 0191US6020241APost metal code engineering for a ROMTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Feb 1, 2000·102 cites·10 claims
- 0259US5753548AMethod for preventing fluorine outgassing-induced interlevel dielectric delamination on P-channel FETSTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted May 19, 1998·21 cites·20 claims
- 0353US5707896AMethod for preventing delamination of interlevel dielectric layer over FET P+ doped polysilicon gate electrodes on semiconductor integrated circuitsTAIWAN SEMICONDUCTOR MANUACTUR·Filed 1996·Granted Jan 13, 1998·17 cites·18 claims
- 0452US7904351B2Inventory tracking mechanism for virtual wafer circuit probing subcontractTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 8, 2011·0 cites·18 claims
- 0542US5652172AMethod for controlling the etch profile of an aperture formed through a multi-layer insulator layerTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jul 29, 1997·14 cites·22 claims
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