Inventor · disambiguated record

Peng Yung-Sung

Also filed as: YUNG-SUNG PENG

1 granted patent·14 citations·filing 1996–1996

36Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0142US5652172AMethod for controlling the etch profile of an aperture formed through a multi-layer insulator layerTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jul 29, 1997·14 cites·22 claims

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