Inventor · disambiguated record
Nobuya Miyoshi
Also filed as: MIYOSHI Nobuya
13 granted patents·3 pending applications·40 citations·filing 2016–2023
86Inventor score
Technology areasH10P
Files withHITACHI HIGH TECH CORP16
Top patents by PatentIndex Score
16 records- 0186USD900760SIon shield plate for semiconductor manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Nov 3, 2020·26 cites·1 claims
- 0284US11915951B2Plasma processing methodHITACHI HIGH TECH CORP·Filed 2020·Granted Feb 27, 2024·1 cites·5 claims
- 0383US10325781B2Etching method and etching apparatusHITACHI HIGH TECH CORP·Filed 2017·Granted Jun 18, 2019·3 cites·12 claims
- 0470US11557463B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2021·Granted Jan 17, 2023·0 cites·10 claims
- 0569US10872779B2Plasma etching method and plasma etching apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Dec 22, 2020·1 cites·13 claims
- 0664USD901407SIntegrated type ion shield for semiconductor manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Nov 10, 2020·9 cites·1 claims
- 0762US10937635B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Mar 2, 2021·0 cites·10 claims
- 0857US2025112055A1Etching processing method and etching processing apparatusHITACHI HIGH TECH CORP·Filed 2023·Application pending·0 cites
- 0955US10290472B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted May 14, 2019·0 cites·8 claims
- 1051US2018122665A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2017·Application pending·0 cites
- 1150US2023085078A1Etching processing method and etching processing apparatusHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 1248US10418254B2Etching method and etching apparatusHITACHI HIGH TECH CORP·Filed 2018·Granted Sep 17, 2019·0 cites·17 claims
- 1347US12051574B2Wafer processing method and plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Jul 30, 2024·0 cites·4 claims
- 1447US11276579B2Substrate processing method and plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2018·Granted Mar 15, 2022·0 cites·12 claims
- 1542US10192720B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted Jan 29, 2019·0 cites·11 claims
- 1638US10141207B2Operation method of plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2017·Granted Nov 27, 2018·0 cites·6 claims
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