Inventor · disambiguated record
Rene Marinus Gerardus Johan Queens
Also filed as: QUEENS RENE MARINUS GERARDUS J · QUEENS RENE MARINUS GERARDUS JOHAN
12 granted patents·566 citations·filing 2003–2019
91Inventor score
Files withASML NETHERLANDS BV12
Top patents by PatentIndex Score
12 records- 0195US7646471B2Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2007·Granted Jan 12, 2010·246 cites·22 claims
- 0295US7265364B2Level sensor for lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 4, 2007·278 cites·34 claims
- 0392US10274849B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Apr 30, 2019·5 cites·20 claims
- 0491US10558130B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 11, 2020·4 cites·22 claims
- 0580US11249404B2System and method for measurement of alignmentASML NETHERLANDS BV·Filed 2018·Granted Feb 15, 2022·2 cites·17 claims
- 0676US7248337B2Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·13 cites·24 claims
- 0773US10684557B2Method for adjusting actuation of a lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jun 16, 2020·1 cites·21 claims
- 0867US6906785B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Jun 14, 2005·11 cites·11 claims
- 0961US10503087B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 10, 2019·1 cites·20 claims
- 1057US6987555B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 17, 2006·5 cites·29 claims
- 1147US10845719B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 24, 2020·0 cites·20 claims
- 1241US11150565B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 19, 2021·0 cites·20 claims
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