Inventor · disambiguated record

Syo Abe

Also filed as: ABE SYO

1 granted patent·0 citations·filing 2011–2011

8Inventor score

Technology areasG03F

Files withUTSUMI YOSHIYUKI1

Top patents by PatentIndex Score

1 record

0143US8614049B2Resist composition and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2011·Granted Dec 24, 2013·0 cites·6 claims

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