Inventor · disambiguated record
Karen L. Holloway
Also filed as: HOLLOWAY KAREN · HOLLOWAY KAREN L · HOLLOWAY KAREN LYNNE
9 granted patents·396 citations·filing 1983–2009
91Inventor score
Top patents by PatentIndex Score
9 records- 0195US4568632APatterning of polyimide films with far ultraviolet lightIBM·Filed 1983·Granted Feb 4, 1986·110 cites·21 claims
- 0287US5130274ACopper alloy metallurgies for VLSI interconnection structuresIBM·Filed 1991·Granted Jul 14, 1992·97 cites·14 claims
- 0385US5243222ACopper alloy metallurgies for VLSI interconnection structuresIBM·Filed 1992·Granted Sep 7, 1993·83 cites·7 claims
- 0482US6576550B1‘Via first’ dual damascene process for copper metallizationINFINEON TECHNOLOGIES CORP·Filed 2000·Granted Jun 10, 2003·39 cites·17 claims
- 0574US6461877B1Variable data compensation for vias or contactsIBM·Filed 2000·Granted Oct 8, 2002·23 cites·11 claims
- 0673US6803668B2Process-robust alignment mark structure for semiconductor wafersIBM·Filed 2002·Granted Oct 12, 2004·20 cites·20 claims
- 0767US8039366B2Method for providing rotationally symmetric alignment marks for an alignment system that requires asymmetric geometric layoutIBM·Filed 2009·Granted Oct 18, 2011·3 cites·20 claims
- 0848USD502758SColor coded nozzleRAIN BIRD CORP·Filed 2003·Granted Mar 8, 2005·9 cites·1 claims
- 0945US5603988AMethod for depositing a titanium or tantalum nitride or nitride silicideMORTON INT INC·Filed 1995·Granted Feb 18, 1997·12 cites·22 claims
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