Inventor · disambiguated record
Takehito Yagi
Also filed as: YAGI TAKEHITO
4 granted patents·66 citations·filing 2001–2008
77Inventor score
Top patents by PatentIndex Score
4 records- 0184US6894839B2Illumination optical system and laser processor having the sameISHIKAWAJIMA HARIMA HEAVY IND·Filed 2002·Granted May 17, 2005·33 cites·14 claims
- 0275US6890839B2Method and apparatus for laser annealing configurations of a beamISHIKAWAJIMA HARIMA HEAVY IND·Filed 2002·Granted May 10, 2005·13 cites·15 claims
- 0371US8093913B2Film thickness measurement device and methodTAKIMOTO HIDETOSHI·Filed 2008·Granted Jan 10, 2012·8 cites·8 claims
- 0469US6621636B2Laser irradiation apparatus and method of laser irradiationSEMICONDUCTOR ENERGY LAB·Filed 2001·Granted Sep 16, 2003·12 cites·23 claims
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