Inventor · disambiguated record
Akitoshi Kumagae
Also filed as: KUMAGAE AKITOSHI
10 granted patents·226 citations·filing 1990–2002
91Inventor score
Files withTOSHIBA KK10
Top patents by PatentIndex Score
10 records- 0188US5326675APattern forming method including the formation of an acidic coating layer on the radiation-sensitive layerTOSHIBA KK·Filed 1992·Granted Jul 5, 1994·49 cites·18 claims
- 0282US6333493B1Heat treating method and heat treating apparatusTOSHIBA KK·Filed 2000·Granted Dec 25, 2001·20 cites·3 claims
- 0376US5969428AAlignment mark, manufacturing method thereof, exposing method using the alignment mark, semiconductor device manufactured using the exposing methodTOSHIBA KK·Filed 1998·Granted Oct 19, 1999·43 cites·3 claims
- 0476US5847468AAlignment mark for use in making semiconductor devicesTOSHIBA KK·Filed 1997·Granted Dec 8, 1998·43 cites·14 claims
- 0566USRE35821EPattern forming method including the formation of an acidic coating layer on the radiation-sensitive layerTOSHIBA KK·Filed 1996·Granted Jun 9, 1998·23 cites·1 claims
- 0661US6483083B2Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surfaceTOSHIBA KK·Filed 2001·Granted Nov 19, 2002·7 cites·11 claims
- 0759US6265696B1Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surfaceTOSHIBA KK·Filed 1999·Granted Jul 24, 2001·21 cites·9 claims
- 0858US6680462B2Heat treating method and heat treating apparatusTOSHIBA KK·Filed 2002·Granted Jan 20, 2004·4 cites·2 claims
- 0955US6495807B2Heat treating method and heat treating apparatusTOSHIBA KK·Filed 2001·Granted Dec 17, 2002·3 cites·3 claims
- 1050US5169740APositive type and negative type ionization irradiation sensitive and/or deep u.v. sensitive resists comprising a halogenated resin binderTOSHIBA KK·Filed 1990·Granted Dec 8, 1992·13 cites·2 claims
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