Inventor · disambiguated record
Koichi Nagakura
Also filed as: NAGAKURA KOICHI
9 granted patents·2 pending applications·51 citations·filing 1984–2020
84Inventor score
Top patents by PatentIndex Score
11 records- 0188US8124539B2Plasma processing apparatus, focus ring, and susceptorENDOH SHOSUKE·Filed 2010·Granted Feb 28, 2012·12 cites·14 claims
- 0277US10903083B2Substrate processing method, substrate processing apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 2017·Granted Jan 26, 2021·2 cites·9 claims
- 0372US10192774B2Temperature control device for processing target object and method of selectively etching nitride film from multilayer filmTOKYO ELECTRON LTD·Filed 2015·Granted Jan 29, 2019·2 cites·6 claims
- 0460US12237173B2Substrate processing method, substrate processing apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 2020·Granted Feb 25, 2025·0 cites·5 claims
- 0560US5753365ARubber composition and all season type pneumatic tires made from a rubber compositionBRIDGESTONE CORP·Filed 1996·Granted May 19, 1998·21 cites·31 claims
- 0657US4602063AProduction of reinforced rubber compositionUBE INDUSTRIES·Filed 1984·Granted Jul 22, 1986·14 cites·11 claims
- 0752US11024514B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 1, 2021·0 cites·16 claims
- 0843US10910229B2Substrate treatment methodTOKYO ELECTRON LTD·Filed 2016·Granted Feb 2, 2021·0 cites·6 claims
- 0941US8071473B2Semiconductor device manufacturing method and storage mediumNARISHIGE KAZUKI·Filed 2008·Granted Dec 6, 2011·0 cites·11 claims
- 1041US2004261946A1Plasma processing apparatus, focus ring, and susceptorTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1135US2017243725A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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