Inventor · disambiguated record
Shinji Orimoto
Also filed as: ORIMOTO SHINJI
10 granted patents·3 pending applications·8 citations·filing 2001–2021
80Inventor score
Top patents by PatentIndex Score
13 records- 0194US11532784B2Substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 20, 2022·3 cites·18 claims
- 0270US11417504B2Stage device and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 16, 2022·1 cites·19 claims
- 0363US10254693B2Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped memberTOKYO ELECTRON LTD·Filed 2015·Granted Apr 9, 2019·1 cites·11 claims
- 0456US12394656B2Mounting table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 19, 2025·0 cites·8 claims
- 0553US6814002B2Printing systemRYOBI LTD·Filed 2001·Granted Nov 9, 2004·3 cites·20 claims
- 0653US2019390326A1Substrate stage and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0752US11605547B2Temperature measuring mechanism, temperature measuring method, and stage deviceTOKYO ELECTRON LTD·Filed 2020·Granted Mar 14, 2023·0 cites·20 claims
- 0846US11293092B2Stage device and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Apr 5, 2022·0 cites·19 claims
- 0945US2023167542A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1044US12392026B2Method and device for substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
- 1142US11414747B2Sputtering deviceTOKYO ELECTRON LTD·Filed 2019·Granted Aug 16, 2022·0 cites·12 claims
- 1240US2020381272A1Placing table structure and treatment deviceTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1338US9787222B2Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Oct 10, 2017·0 cites·8 claims
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