Inventor · disambiguated record
Kuo-Hung Chao
Also filed as: CHAO KUO-HUNG
5 granted patents·2 pending applications·33 citations·filing 2000–2023
75Inventor score
Top patents by PatentIndex Score
7 records- 0178US9123583B2Overlay abnormality gating by Z dataTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 1, 2015·4 cites·20 claims
- 0277US9826615B2EUV collector with orientation to avoid contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 21, 2017·3 cites·20 claims
- 0371US6309944B1Overlay matching method which eliminates alignment induced errors and optimizes lens matchingTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Oct 30, 2001·23 cites·3 claims
- 0466US9466101B2Detection of defects on wafer during semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Oct 11, 2016·3 cites·20 claims
- 0564US2025180999A1Method of manufacturing a semiconductor device and apparatus for manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0651US2023367220A1Method of manufacturing a semiconductor device and apparatus for manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0746US9228827B2Flexible wafer leveling design for various orientation of line/trenchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 5, 2016·0 cites·20 claims
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