Inventor · disambiguated record
Petrus Rutgerus Bartray
Also filed as: BARTRAY PETRUS R · BARTRAY PETRUS RUTGERUS
12 granted patents·99 citations·filing 1991–2009
89Inventor score
Files withASML NETHERLANDS BV8ASML NETHERLAND BV1AUER-JONGEPIER SUZAN L1LOOPSTRA ERIK ROELOF1PHILIPS CORP1
Top patents by PatentIndex Score
12 records- 0176US5204712ASupport device with a tiltable object table, and optical lithographic device provided with such a support devicePHILIPS CORP·Filed 1991·Granted Apr 20, 1993·68 cites·33 claims
- 0271US7522258B2Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contaminationASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·3 cites·35 claims
- 0368US7253880B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 7, 2007·9 cites·34 claims
- 0458US8636458B2Integrated post-exposure bake trackAUER-JONGEPIER SUZAN L·Filed 2007·Granted Jan 28, 2014·2 cites·21 claims
- 0557US8289498B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 16, 2012·1 cites·8 claims
- 0656US7804584B2Integrated circuit manufacturing methods with patterning device position determinationASML NETHERLAND BV·Filed 2008·Granted Sep 28, 2010·0 cites·20 claims
- 0755US7471373B2Lithographic apparatus with patterning device position determinationASML NETHERLANDS BV·Filed 2004·Granted Dec 30, 2008·3 cites·23 claims
- 0855US7126664B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·4 cites·29 claims
- 0953US7130019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 31, 2006·3 cites·27 claims
- 1050US7408615B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 5, 2008·3 cites·41 claims
- 1148US7345736B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 18, 2008·2 cites·20 claims
- 1234US7349067B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 25, 2008·1 cites·15 claims
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