Inventor · disambiguated record
Igeta Masonobu
Also filed as: MASONOBU IGETA
2 granted patents·10 citations·filing 2005–2005
55Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0173US7300891B2Method and system for increasing tensile stress in a thin film using multi-frequency electromagnetic radiationTOKYO ELECTRON LTD·Filed 2005·Granted Nov 27, 2007·7 cites·26 claims
- 0262US7265066B2Method and system for increasing tensile stress in a thin film using collimated electromagnetic radiationTOKYO ELECTRON LTD·Filed 2005·Granted Sep 4, 2007·3 cites·31 claims
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