Inventor · disambiguated record
Toshiyuki Takamatsu
Also filed as: TAKAMATSU TOSHIYUKI
8 granted patents·2 pending applications·209 citations·filing 1991–2021
89Inventor score
Top patents by PatentIndex Score
10 records- 0183US6579465B1Plasma surface treatment method and resulting deviceANNEAL CORP·Filed 2000·Granted Jun 17, 2003·28 cites·21 claims
- 0274US5259407ASurface treatment method and apparatus for a semiconductor waferMATRIX INC·Filed 1991·Granted Nov 9, 1993·77 cites·4 claims
- 0365US6149829APlasma surface treatment method and resulting deviceMITZEL JAMES W·Filed 1998·Granted Nov 21, 2000·30 cites·11 claims
- 0460US6472299B2Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 KYAMANASHI PREFECTURAL FEDERATI·Filed 2001·Granted Oct 29, 2002·12 cites·6 claims
- 0555US6255197B1Hydrogen annealing method and apparatusMITZEL JIM·Filed 1999·Granted Jul 3, 2001·22 cites·20 claims
- 0652US7014788B1Surface treatment method and equipmentJIM MITZEL·Filed 1999·Granted Mar 21, 2006·20 cites·14 claims
- 0746US2024212986A1High frequency reaction processing apparatus and high frequency reaction processing systemSST INC·Filed 2021·Application pending·0 cites
- 0845US6562079B1Microwave discharge apparatusFiled 1999·Granted May 13, 2003·11 cites·11 claims
- 0938US6419772B1Method for attaching radio wave absorber and structure for attaching the sameOTSUKA CHEMICAL CO LTD·Filed 1998·Granted Jul 16, 2002·9 cites·20 claims
- 1036US2005212626A1High frequency reaction processing systemTAKAMATSU TOSHIYUKI·Filed 2003·Application pending·0 cites
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