Inventor · disambiguated record
Shinji Akaike
Also filed as: AKAIKE SHINJI
6 granted patents·2 pending applications·261 citations·filing 1995–2015
82Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0193US5777485AProbe method and apparatus with improved probe contactTOKYO ELECTRON LTD·Filed 1996·Granted Jul 7, 1998·141 cites·8 claims
- 0290US5640101AProbe system and probe methodTOKYO ELECTRON LTD·Filed 1996·Granted Jun 17, 1997·90 cites·12 claims
- 0369US5585738AProbe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustmentTOKYO ELECTRON LTD·Filed 1995·Granted Dec 17, 1996·30 cites·16 claims
- 0444US2015017782A1Bonding device and bonding methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0544US2016001543A1Bonding device, bonding system, and bonding methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0633US10006941B2Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unitTOKYO ELECTRON LTD·Filed 2015·Granted Jun 26, 2018·0 cites·13 claims
- 0731US10074192B2Substrate inspection apparatus and control method thereofTOKYO ELECTRON LTD·Filed 2015·Granted Sep 11, 2018·0 cites·6 claims
- 0830US10310010B2Probe apparatus and probe methodTOKYO ELECTRON LTD·Filed 2015·Granted Jun 4, 2019·0 cites·5 claims
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