Inventor · disambiguated record

Shinya Okano

Also filed as: OKANO SHINYA

18 granted patents·4 pending applications·55 citations·filing 20112025

91Inventor score
Technology areasH10PH02JH05KY02EG09G
Files withTOKYO ELECTRON LTD10SEMICONDUCTOR ENERGY LAB9KAMATA KOICHIRO2HAYAKAWA MASAHIKO1

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