Inventor · disambiguated record
Alessandro Polo
Also filed as: POLO ALESSANDRO
17 granted patents·1 pending application·24 citations·filing 2016–2020
89Inventor score
Top patents by PatentIndex Score
18 records- 0189US10788766B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·4 cites·19 claims
- 0287US10585363B2Alignment systemASML NETHERLANDS BV·Filed 2016·Granted Mar 10, 2020·4 cites·15 claims
- 0384US10845304B2Scatterometer and method of scatterometry using acoustic radiationASML NETHERLANDS BV·Filed 2018·Granted Nov 24, 2020·2 cites·12 claims
- 0484US10678145B2Radiation receiving systemASML NETHERLANDS BV·Filed 2018·Granted Jun 9, 2020·2 cites·20 claims
- 0584US10466601B2Alignment sensor for lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Nov 5, 2019·5 cites·20 claims
- 0680US10317808B2Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 11, 2019·3 cites·18 claims
- 0779US10444638B2Method for parameter determination and apparatus thereofASML NETHERLANDS BV·Filed 2018·Granted Oct 15, 2019·1 cites·13 claims
- 0878US11086240B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2017·Granted Aug 10, 2021·2 cites·15 claims
- 0974US10101675B2Metrology apparatus, method of measuring a structure and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Oct 16, 2018·1 cites·20 claims
- 1070US11536654B2Scatterometer and method of scatterometry using acoustic radiationASML NETHERLANDS BV·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 1161US11428925B2Position metrology apparatus and associated optical elementsASML NETHERLANDS BV·Filed 2019·Granted Aug 30, 2022·0 cites·3 claims
- 1256US11761929B2Sensor apparatus for lithographic measurementsASML NETHERLANDS BV·Filed 2019·Granted Sep 19, 2023·0 cites·19 claims
- 1356US11300892B2Sensor apparatus and method for lithographic measurementsASML NETHERLANDS BV·Filed 2019·Granted Apr 12, 2022·0 cites·15 claims
- 1456US11099489B2Method of measuring a parameter of a lithographic process, metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
- 1554US11333985B2Position sensorASML NETHERLANDS BV·Filed 2019·Granted May 17, 2022·0 cites·22 claims
- 1653US11927891B2Apparatus and methods for determining the position of a target structure on a substrateASML NETHERLANDS BV·Filed 2018·Granted Mar 12, 2024·0 cites·13 claims
- 1745US2022100109A1Apparatus for and method of simultaneously acquiring parallel alignment marksASML HOLDING NV·Filed 2019·Application pending·0 cites
- 1844US10527959B2Position sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2017·Granted Jan 7, 2020·0 cites·20 claims
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