Inventor · disambiguated record
Jörg Frederik Blumrich
Also filed as: BLUMRICH JÖRG FREDERIK
2 granted patents·1 pending application·15 citations·filing 2017–2017
55Inventor score
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0192US10108085B2Method for localizing defects on substratesZEISS CARL SMT GMBH·Filed 2017·Granted Oct 23, 2018·13 cites·20 claims
- 0280US10386297B2Method and apparatus for examining an element of a photolithographic mask for the EUV rangeZEISS CARL SMT GMBH·Filed 2017·Granted Aug 20, 2019·2 cites·20 claims
- 0332US2017176851A1Method for producing a mask for the extreme ultraviolet wavelength range, mask and deviceZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →