Inventor · disambiguated record
Seog-Min Lee
Also filed as: LEE SEOG-MIN
4 granted patents·33 citations·filing 2004–2014
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0181US9666459B2Apparatus for processing wafersSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted May 30, 2017·7 cites·19 claims
- 0278US7425761B2Method of manufacturing a dielectric film in a capacitorSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Sep 16, 2008·6 cites·20 claims
- 0374US7140384B2Substrate processing equipment having mass flow controllerSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Nov 28, 2006·18 cites·4 claims
- 0456US9159591B2Batch type apparatus for manufacturing semiconductor devicesYANG CHEOL-KYU·Filed 2012·Granted Oct 13, 2015·2 cites·20 claims
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