Inventor · disambiguated record
Cheol-Kyu Yang
Also filed as: YANG CHEOL-KYU
4 granted patents·2 pending applications·23 citations·filing 2004–2016
72Inventor score
Top patents by PatentIndex Score
6 records- 0181US9666459B2Apparatus for processing wafersSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted May 30, 2017·7 cites·19 claims
- 0264US7189661B2Method of forming silicon oxynitride layer in semiconductor device and apparatus of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 13, 2007·2 cites·14 claims
- 0356US9159591B2Batch type apparatus for manufacturing semiconductor devicesYANG CHEOL-KYU·Filed 2012·Granted Oct 13, 2015·2 cites·20 claims
- 0456US7131456B2Mass flow controllerSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Nov 7, 2006·12 cites·11 claims
- 0542US2005263073A1Furnace for heating a wafer and chemical vapor deposition apparatus having the sameKANG SUNG-HO·Filed 2005·Application pending·0 cites
- 0630US2017051409A1Thin film deposition apparatusNOH YOUNG JIN·Filed 2016·Application pending·0 cites
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