Inventor · disambiguated record
Marvin R. Lafontaine
Also filed as: LAFONTAINE MARVIN · LAFONTAINE MARVIN R · LAFONTAINE MARVIN RAYMOND
12 granted patents·3 pending applications·95 citations·filing 1997–2011
88Inventor score
Top patents by PatentIndex Score
15 records- 0191US8422193B2Annulus clamping and backside gas cooled electrostatic chuckTAO TENG CHAO D·Filed 2006·Granted Apr 16, 2013·58 cites·25 claims
- 0283US7952851B2Wafer grounding method for electrostatic clampsAXCELIS TECH INC·Filed 2008·Granted May 31, 2011·10 cites·12 claims
- 0382US7560705B2Workpiece handling scan arm for ion implantation systemAXCELIS TECH INC·Filed 2007·Granted Jul 14, 2009·12 cites·22 claims
- 0477US8270142B2De-clamping wafers from an electrostatic chuckLEE WILLIAM D·Filed 2008·Granted Sep 18, 2012·6 cites·18 claims
- 0569US7828504B2Combination load lock for handling workpiecesAXCELIS TECH INC·Filed 2006·Granted Nov 9, 2010·4 cites·19 claims
- 0661US9036326B2Gas bearing electrostatic chuckLEE WILLIAM DAVID·Filed 2008·Granted May 19, 2015·2 cites·19 claims
- 0760US7714406B2Low-cost electrostatic clamp with fast de-clamp timeAXCELIS TECH INC·Filed 2007·Granted May 11, 2010·2 cites·13 claims
- 0853US8023247B2Electrostatic chuck with compliant coatAXCELIS TECH INC·Filed 2008·Granted Sep 20, 2011·0 cites·11 claims
- 0948US8902560B2Electrostatic chuck ground punchSMITH DAVID B·Filed 2008·Granted Dec 2, 2014·0 cites·16 claims
- 1047US8241425B2Non-condensing thermos chuckLEE WILLIAM D·Filed 2009·Granted Aug 14, 2012·0 cites·11 claims
- 1137US2013160704A1Crucible support structureLAFONTAINE MARVIN·Filed 2011·Application pending·0 cites
- 1236US9558980B2Vapor compression refrigeration chuck for ion implantersLEE WILLIAM D·Filed 2010·Granted Jan 31, 2017·0 cites·17 claims
- 1335US2002088944A1Charge exchange device for charged particle acceleratorFiled 2001·Application pending·0 cites
- 1433US2003122088A1Scan methods and apparatus for ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Application pending·0 cites
- 1523US5838012ACharge exchange cellGENUS INC·Filed 1997·Granted Nov 17, 1998·1 cites·11 claims
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