Inventor · disambiguated record

Shouquian Shao

Also filed as: SHAO SHOUQUIAN

1 granted patent·13 citations·filing 2007–2007

40Inventor score

Technology areasH01J

Files withMKS INSTR INC1

Top patents by PatentIndex Score

1 record

0190US7659489B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2007·Granted Feb 9, 2010·13 cites·34 claims

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