Inventor · disambiguated record
Andrew Cowe
Also filed as: COWE ANDREW · COWE ANDREW B · COWE ANDREW BARNETT
19 granted patents·7 pending applications·844 citations·filing 2001–2025
94Inventor score
Top patents by PatentIndex Score
26 records- 0198US9449793B2Systems, methods and apparatus for choked flow element extractionSHAJII ALI·Filed 2010·Granted Sep 20, 2016·469 cites·16 claims
- 0297US6815633B1Inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Nov 9, 2004·207 cites·64 claims
- 0395US6872909B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselAPPLIED SCIENCE & TECH INC·Filed 2003·Granted Mar 29, 2005·55 cites·10 claims
- 0493US7501600B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2005·Granted Mar 10, 2009·17 cites·25 claims
- 0590US7659489B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2007·Granted Feb 9, 2010·13 cites·34 claims
- 0688US9275839B2Toroidal plasma chamber for high gas flow rate processCHEN XING·Filed 2007·Granted Mar 1, 2016·13 cites·13 claims
- 0788US7166816B1Inductively-coupled torodial plasma sourceMKS INSTR INC·Filed 2004·Granted Jan 23, 2007·56 cites·18 claims
- 0881US11664197B2Method and apparatus for plasma generationMKS INSTR INC·Filed 2021·Granted May 30, 2023·1 cites·26 claims
- 0980US2025372408A1Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolationMKS INC·Filed 2025·Application pending·0 cites
- 1072US8692466B2Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generatorBENZERROUK SOUHEIL·Filed 2009·Granted Apr 8, 2014·3 cites·44 claims
- 1171US7914603B2Particle trap for a plasma sourceMKS INSTR INC·Filed 2008·Granted Mar 29, 2011·2 cites·56 claims
- 1269US8999104B2Systems, methods and apparatus for separate plasma source controlSHAJII ALI·Filed 2010·Granted Apr 7, 2015·2 cites·16 claims
- 1369US2023258283A1Heated throttle valve apparatus and methods of use and manufactureMKS INSTR INC·Filed 2023·Application pending·0 cites
- 1469US2023296181A1Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolationMKS INSTR INC·Filed 2023·Application pending·0 cites
- 1567US9967965B2Distributed, concentric multi-zone plasma source systems, methods and apparatusLAM RES CORP·Filed 2012·Granted May 8, 2018·2 cites·18 claims
- 1664US2020332920A1Heated Throttle Valve Apparatus and Methods of Use and ManufactureMKS INSTURMENTS INC·Filed 2020·Application pending·0 cites
- 1763US10283325B2Distributed multi-zone plasma source systems, methods and apparatusSHAJII ALI·Filed 2012·Granted May 7, 2019·1 cites·16 claims
- 1862US12159765B2Method and apparatus for plasma generationMKS INSTR INC·Filed 2022·Granted Dec 3, 2024·0 cites·26 claims
- 1959US9070538B2Pinched plasma bridge flood gun for substrate charge neutralizationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jun 30, 2015·1 cites·23 claims
- 2058US9155181B2Distributed multi-zone plasma source systems, methods and apparatusSHAJII ALI·Filed 2010·Granted Oct 6, 2015·1 cites·12 claims
- 2156US9029809B2Movable microchamber system with gas curtainPUN DIGBY·Filed 2012·Granted May 12, 2015·1 cites·40 claims
- 2256US2018228015A1Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Methods and ApparatusLAM RES CORP·Filed 2018·Application pending·0 cites
- 2351US10424460B2Systems, methods and apparatus for choked flow element extractionLAM RES CORP·Filed 2016·Granted Sep 24, 2019·0 cites·14 claims
- 2451US2011005922A1Methods and Apparatus for Protecting Plasma Chamber SurfacesMKS INSTR INC·Filed 2009·Application pending·0 cites
- 2549US11854839B2Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolationMKS INSTR INC·Filed 2020·Granted Dec 26, 2023·0 cites·14 claims
- 2647US2008302652A1Particle Reduction Through Gas and Plasma Source ControlMKS INSTR INC·Filed 2008·Application pending·0 cites
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