Inventor · disambiguated record
Anlun Tang
Also filed as: TANG ANLUN
3 granted patents·34 citations·filing 2002–2008
66Inventor score
Top patents by PatentIndex Score
3 records- 0180US6686995B2Two-dimensional UV compatible programmable spatial filterKLA TENCOR TECH CORP·Filed 2002·Granted Feb 3, 2004·26 cites·30 claims
- 0260US6686994B2UV compatible programmable spatial filterKLA TENCOR TECH CORP·Filed 2002·Granted Feb 3, 2004·8 cites·31 claims
- 0323US7796259B2Rapid acquisition ellipsometryWEIFOUR INC·Filed 2008·Granted Sep 14, 2010·0 cites·33 claims
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