Inventor · disambiguated record
Gerd Benner
Also filed as: BENNER GERD · BENNER GERD LUDWIG
27 granted patents·2 pending applications·336 citations·filing 1989–2019
96Inventor score
Files withBENNER GERD7ZEISS CARL MICROSCOPY GMBH5ZEISS CARL NTS GMBH4ZEISS STIFTUNG4LEO ELEKTRONENMIKROSKOPIE GMBH3
Top patents by PatentIndex Score
29 records- 0194US9991089B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Jun 5, 2018·34 cites·24 claims
- 0294US9349571B2Particle optical systemZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted May 24, 2016·33 cites·18 claims
- 0390US7741602B2Phase contrast electron microscopeZEISS CARL NTS GMBH·Filed 2007·Granted Jun 22, 2010·15 cites·18 claims
- 0489US9799485B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Oct 24, 2017·8 cites·10 claims
- 0587US7902506B2Phase-shifting element and particle beam device having a phase-shifting elementZEISS CARL NTS GMBH·Filed 2008·Granted Mar 8, 2011·10 cites·17 claims
- 0687US6797956B2Electron microscope with annular illuminating apertureLEO ELEKTRONENMIKROSKOPIE GMBH·Filed 2003·Granted Sep 28, 2004·26 cites·11 claims
- 0787US6040576AEnergy filter, particularly for an electron microscopeLEO ELEKTRONENMIKROSKOPIE GMBH·Filed 1998·Granted Mar 21, 2000·51 cites·13 claims
- 0885US5013913AMethod of illuminating an object in a transmission electron microscopeZEISS STIFTUNG·Filed 1989·Granted May 7, 1991·32 cites·15 claims
- 0982US6657211B2Process for electron beam lithography, and electron-optical lithography systemLEO ELEKTRONENMIKROSKOPIE·Filed 2001·Granted Dec 2, 2003·23 cites·32 claims
- 1079US6531698B1Particle-optic illuminating and imaging system with a condenser-objective single field lensLEO ELEKTRONENMIKROSKOPIE GMBH·Filed 2000·Granted Mar 11, 2003·15 cites·20 claims
- 1177US8476589B2Particle beam microscopeBENNER GERD·Filed 2012·Granted Jul 2, 2013·5 cites·19 claims
- 1277US8173963B2Phase-shifting element and particle beam device having a phase-shifting elementSCHROEDER RASMUS·Filed 2011·Granted May 8, 2012·4 cites·25 claims
- 1375US8471203B2Particle-beam microscopeBENNER GERD·Filed 2010·Granted Jun 25, 2013·4 cites·35 claims
- 1471US5483073AMethod of illuminating an object with a focused electron beam and an electron-optical illuminating system thereforZEISS STIFTUNG·Filed 1993·Granted Jan 9, 1996·23 cites·15 claims
- 1569US9543115B2Electron microscopeZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Jan 10, 2017·2 cites·20 claims
- 1669US8299442B2Particle beam apparatus having an annularly-shaped illumination apertureBENNER GERD·Filed 2009·Granted Oct 30, 2012·2 cites·14 claims
- 1767US5519216AElectron-optical imaging system having controllable elementsZEISS STIFTUNG·Filed 1994·Granted May 21, 1996·22 cites·10 claims
- 1866US8541739B2Precession diffraction charged particle beam systemBENNER GERD·Filed 2011·Granted Sep 24, 2013·2 cites·20 claims
- 1966US6437353B1Particle-optical apparatus and process for the particle-optical production of microstructuresZEISS STIFTUNG·Filed 1999·Granted Aug 20, 2002·17 cites·24 claims
- 2064US8748819B2Transmission electron microscopy system and method of operating a transmission electron microscopy systemZEISS CARL MICROSCOPY GMBH·Filed 2013·Granted Jun 10, 2014·1 cites·23 claims
- 2164US8431894B2Electron beam deviceESSERS ERIK·Filed 2005·Granted Apr 30, 2013·2 cites·35 claims
- 2263US8598526B2Transmission electron microscopeBENNER GERD·Filed 2011·Granted Dec 3, 2013·1 cites·19 claims
- 2358US7060978B2Detector system for a particle beam apparatus, and particle beam apparatus with such a detector systemZEISS CARL NTS GMBH·Filed 2001·Granted Jun 13, 2006·4 cites·20 claims
- 2453US8330105B2Phase contrast electron microscopeBENNER GERD·Filed 2011·Granted Dec 11, 2012·0 cites·15 claims
- 2551US8436302B2Phase-shifting element and particle beam device having a phase-shifting elementSCHROEDER RASMUS·Filed 2012·Granted May 7, 2013·0 cites·24 claims
- 2651US8039796B2Phase contrast electron microscopeZEISS CARL NTS GMBH·Filed 2010·Granted Oct 18, 2011·0 cites·4 claims
- 2737US10811216B2Method for automatically aligning a scanning transmission electron microscope for precession electron diffraction data mappingTESCAN BRNO S R O·Filed 2019·Granted Oct 20, 2020·0 cites·12 claims
- 2837US2012326030A1Particle Beam MicroscopeBENNER GERD·Filed 2011·Application pending·0 cites
- 2933US2013256558A1Apparatus for contaminants being deposited thereonDIETL CHRISTIAN·Filed 2012·Application pending·0 cites
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