Inventor · disambiguated record
Hirotsugu Wada
Also filed as: WADA HIROTSUGU
13 granted patents·2 pending applications·210 citations·filing 1979–2011
92Inventor score
Files withTOSHIBA KK6TOKYO SHIBAURA ELECTRIC CO3VLSI TECHNOLOGY RES ASS2HASHIGUCHI TAKAAKI1MIYAMOTO TAKASHI1
Top patents by PatentIndex Score
15 records- 0181US4543512AElectron beam exposure systemTOKYO SHIBAURA ELECTRIC CO·Filed 1981·Granted Sep 24, 1985·34 cites·10 claims
- 0279US5047646AMethod of correcting astigmatism of variable shaped beamTOSHIBA KK·Filed 1990·Granted Sep 10, 1991·35 cites·19 claims
- 0372US5254417AReflection mask and electrically charged beam exposing apparatus using the reflection maskTOSHIBA KK·Filed 1991·Granted Oct 19, 1993·25 cites·9 claims
- 0471US5234780AExposure mask, method of manufacturing the same, and exposure method using the sameTOSHIBA KK·Filed 1990·Granted Aug 10, 1993·20 cites·2 claims
- 0561US4346325AElectron gunVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Aug 24, 1982·9 cites·3 claims
- 0658US5843603AMethod of evaluating shaped beam of charged beam writer and method of forming patternTOSHIBA KK·Filed 1996·Granted Dec 1, 1998·14 cites·8 claims
- 0757US8552594B2Noncontact power feed system, noncontact relay apparatus, noncontract power reception apparatus, and noncontact power feed methodWADA HIROTSUGU·Filed 2010·Granted Oct 8, 2013·3 cites·15 claims
- 0855US4636968AMethod of positioning a beam to a specific portion of a semiconductor waferTOSHIBA KK·Filed 1984·Granted Jan 13, 1987·20 cites·10 claims
- 0952US4647782ACharged particle beam exposure apparatusTOKYO SHIBAURA ELECTRIC CO·Filed 1985·Granted Mar 3, 1987·19 cites·8 claims
- 1050US5358808AExposure mask, method of manufacturing the same, and exposure method using the sameTOSHIBA KK·Filed 1993·Granted Oct 25, 1994·10 cites·13 claims
- 1148US4558225ATarget body position measuring method for charged particle beam fine pattern exposure systemTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted Dec 10, 1985·15 cites·10 claims
- 1246US4269653AAperture stopVLSI TECHNOLOGY RES ASS·Filed 1979·Granted May 26, 1981·6 cites·4 claims
- 1342US2012038317A1Wireless charging systemMIYAMOTO TAKASHI·Filed 2011·Application pending·0 cites
- 1441US2011163609A1Wireless power feed systemSONY CORP·Filed 2010·Application pending·0 cites
- 1540US9490638B2Electrical power transmission system and electrical power output deviceHASHIGUCHI TAKAAKI·Filed 2010·Granted Nov 8, 2016·0 cites·9 claims
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