Inventor · disambiguated record
Kinya Miyashita
Also filed as: MIYASHITA KINYA
15 granted patents·1 pending application·234 citations·filing 1993–2010
93Inventor score
Top patents by PatentIndex Score
16 records- 0193US8238072B2Bipolar electrostatic chuckFUJISAWA HIROSHI·Filed 2010·Granted Aug 7, 2012·20 cites·10 claims
- 0293US7881036B2Electrode sheet for electrostatic chuck, and electrostatic chuckCREATIVE TECH CORP·Filed 2006·Granted Feb 1, 2011·24 cites·7 claims
- 0381US5968273AWafer stage for manufacturing a semiconductor deviceSONY CORP·Filed 1997·Granted Oct 19, 1999·66 cites·2 claims
- 0480US8469342B2Substrate suction apparatus and method for manufacturing the sameTATSUMI YOSHIAKI·Filed 2008·Granted Jun 25, 2013·7 cites·6 claims
- 0580US6813134B2Electrostatic chucking device and manufacturing method thereofCREATIVE TECH CORP·Filed 2001·Granted Nov 2, 2004·23 cites·6 claims
- 0678US5981913AStatic electricity chuck and wafer stageSONY CORP·Filed 1997·Granted Nov 9, 1999·55 cites·9 claims
- 0773US8051548B2Method of manufacturing an electrostatic chuckCREATIVE TECH CORP·Filed 2008·Granted Nov 8, 2011·4 cites·5 claims
- 0867US7567421B2Bipolar electrostatic chuckCREATIVE TECH CORP·Filed 2004·Granted Jul 28, 2009·11 cites·9 claims
- 0965US8027171B2Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuckCREATIVE TECH CORP·Filed 2006·Granted Sep 27, 2011·2 cites·9 claims
- 1063US8196594B2Apparatus for removing foreign material from substrate and method for removing foreign material from substrateHARANO RIICHIRO·Filed 2006·Granted Jun 12, 2012·3 cites·16 claims
- 1163US8158238B2Electrostatic chuck and electrode sheet for electrostatic chuckMIYASHITA KINYA·Filed 2006·Granted Apr 17, 2012·3 cites·11 claims
- 1250US7411773B2Electrostatic chucking device and manufacturing method thereofCREATIVE TECH CORP·Filed 2004·Granted Aug 12, 2008·2 cites·4 claims
- 1347US5595704AMethod of using a shaping mold for making ultra-thin shaped rubber articlesSOZO KAGAKU KK·Filed 1993·Granted Jan 21, 1997·12 cites·16 claims
- 1446US2007223173A1Bipolar Electrostatic ChuckFUJISAWA HIROSHI·Filed 2005·Application pending·0 cites
- 1540US7300707B2Aluminium composite structure having a channel therein and method of manufacturing the sameCREATIVE TECH CORP·Filed 2004·Granted Nov 27, 2007·0 cites·7 claims
- 1630US5667822AShaping mold for making ultra-thin shaped rubber articlesSOZO KAGAKU KK·Filed 1996·Granted Sep 16, 1997·2 cites·11 claims
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