Inventor · disambiguated record
Yan Chen
Also filed as: CHEN YAN · CHEN YAN BIN
45 granted patents·9 pending applications·145 citations·filing 2006–2024
97Inventor score
Files withTOKYO ELECTRON LTD25GENIUS ELECTRONIC OPTICAL CO LTD16UNIV NAT TAIWAN2ACCELINK TECH CO LTD1ACCELINK TECHNOLOGIES CO LTD1
Top patents by PatentIndex Score
54 records- 0195US11538723B2Optical diagnostics of semiconductor process using hyperspectral imagingTOKYO ELECTRON LTD·Filed 2020·Granted Dec 27, 2022·3 cites·25 claims
- 0294US9217848B1Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2014·Granted Dec 22, 2015·19 cites·19 claims
- 0392US10910201B1Synthetic wavelengths for endpoint detection in plasma etchingTOKYO ELECTRON LTD·Filed 2019·Granted Feb 2, 2021·7 cites·22 claims
- 0492US10473525B2Spatially resolved optical emission spectroscopy (OES) in plasma processingTOKYO ELECTRON LTD·Filed 2017·Granted Nov 12, 2019·6 cites·20 claims
- 0592US7327475B1Measuring a process parameter of a semiconductor fabrication process using optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Feb 5, 2008·19 cites·41 claims
- 0689US7467064B2Transforming metrology data from a semiconductor treatment system using multivariate analysisTIMBRE TECH INC·Filed 2006·Granted Dec 16, 2008·16 cites·22 claims
- 0788US9330990B2Method of endpoint detection of plasma etching process using multivariate analysisTOKYO ELECTRON LTD·Filed 2013·Granted May 3, 2016·10 cites·10 claims
- 0886US10002804B2Method of endpoint detection of plasma etching process using multivariate analysisTOKYO ELECTRON LTD·Filed 2016·Granted Jun 19, 2018·5 cites·9 claims
- 0984US9970818B2Spatially resolved optical emission spectroscopy (OES) in plasma processingTOKYO ELECTRON LTD·Filed 2014·Granted May 15, 2018·5 cites·19 claims
- 1083US8346506B2Transforming metrology data from a semiconductor treatment system using multivariate analysisTOKYO ELECTRON LTD·Filed 2012·Granted Jan 1, 2013·4 cites·4 claims
- 1182US10453653B2Endpoint detection algorithm for atomic layer etching (ALE)TOKYO ELECTRON LTD·Filed 2017·Granted Oct 22, 2019·3 cites·13 claims
- 1280US8170833B2Transforming metrology data from a semiconductor treatment system using multivariate analysisVUONG VI·Filed 2008·Granted May 1, 2012·9 cites·11 claims
- 1379US7522294B2Measuring a process parameter of a semiconductor fabrication process using optical metrologyTOKYO ELECTRON LTD·Filed 2008·Granted Apr 21, 2009·5 cites·22 claims
- 1478US12165937B2Optical diagnostics of semiconductor process using hyperspectral imagingTOKYO ELECTRON LTD·Filed 2022·Granted Dec 10, 2024·0 cites·22 claims
- 1577US9541734B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2015·Granted Jan 10, 2017·3 cites·19 claims
- 1676US9857558B1Optical imaging lensGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2016·Granted Jan 2, 2018·3 cites·19 claims
- 1776US2024419885A1Hybrid modeling for film metrologyTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1875US10332861B2Interconnection structures and methods for making the sameUNIV NAT TAIWAN·Filed 2017·Granted Jun 25, 2019·2 cites·3 claims
- 1974US12306044B2Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 2073US2024418501A1Optical sensor for film thickness measurementTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2172US9851532B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2015·Granted Dec 26, 2017·2 cites·19 claims
- 2272US9557525B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2013·Granted Jan 31, 2017·2 cites·19 claims
- 2372US7428044B2Drift compensation for an optical metrology toolTOKYO ELECTRON LTD·Filed 2006·Granted Sep 23, 2008·3 cites·29 claims
- 2471US9217843B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2013·Granted Dec 22, 2015·3 cites·13 claims
- 2570US9341816B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2014·Granted May 17, 2016·1 cites·14 claims
- 2669US11538722B2Optical diagnostics of semiconductor process using hyperspectral imagingTOKYO ELECTRON LTD·Filed 2020·Granted Dec 27, 2022·0 cites·16 claims
- 2769US9798108B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2014·Granted Oct 24, 2017·2 cites·18 claims
- 2868US9513534B2Mobil device and optical imaging lens having four lens elements thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2014·Granted Dec 6, 2016·2 cites·15 claims
- 2968US8929000B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2013·Granted Jan 6, 2015·1 cites·18 claims
- 3067US10837902B2Optical sensor for phase determinationTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·1 cites·20 claims
- 3165US9264594B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2014·Granted Feb 16, 2016·1 cites·17 claims
- 3264US7505148B2Matching optical metrology tools using spectra enhancementTOKYO ELECTRON LTD·Filed 2006·Granted Mar 17, 2009·1 cites·37 claims
- 3363US12158374B2Time-resolved OES data collectionTOKYO ELECTRON LTD·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 3463US10205520B2Method and device for measuring optical signal-to-noise ratioACCELINK TECH CO LTD·Filed 2017·Granted Feb 12, 2019·1 cites·20 claims
- 3563US9645360B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2015·Granted May 9, 2017·1 cites·15 claims
- 3663US7523021B2Weighting function to enhance measured diffraction signals in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Apr 21, 2009·4 cites·18 claims
- 3762US9377602B2Imaging lens, and electronic apparatus including the sameGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2013·Granted Jun 28, 2016·1 cites·17 claims
- 3856US12362158B2Method for OES data collection and endpoint detectionTOKYO ELECTRON LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 3956US2023293777A1Implant materials and implants suitable for implantation in bone defect repair and spinal fusion, and preparation methods thereofTHE FIRST AFFILIATED HOSPITAL SUN YAT SEN UNIV·Filed 2021·Application pending·0 cites
- 4055US2025283814A1Method for optical emission spectroscopy (oes) detector signal sensitivity improvementTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 4154US9772471B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2016·Granted Sep 26, 2017·0 cites·19 claims
- 4253US11692874B2Peak alignment for the wavelength calibration of a spectrometerTOKYO ELECTRON LTD·Filed 2021·Granted Jul 4, 2023·0 cites·11 claims
- 4352US11763161B2Enhanced resolution in semiconductor fabrication data acquisition instruments using machine learningTOKYO ELECTRON LTD·Filed 2020·Granted Sep 19, 2023·0 cites·12 claims
- 4451US9541731B2Mobile device and optical imaging lens thereofGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2015·Granted Jan 10, 2017·0 cites·10 claims
- 4551US9217846B2Imaging lens, and electronic apparatus including the sameGENIUS ELECTRONIC OPTICAL CO LTD·Filed 2014·Granted Dec 22, 2015·0 cites·18 claims
- 4651US2025017482A1Contactless electrocardiogram monitoring method based on millimeter-wave radarUNIV SCIENCE & TECHNOLOGY CHINA·Filed 2022·Application pending·0 cites
- 4747US2022139743A1Optical Sensor for Inspecting Pattern Collapse DefectsTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 4846US10133081B2Beam splitter, laser generator and excimer laser annealing apparatusBOE TECHNOLOGY GROUP CO LTD·Filed 2016·Granted Nov 20, 2018·0 cites·8 claims
- 4945US9786634B2Interconnection structures and methods for making the sameUNIV NAT TAIWAN·Filed 2015·Granted Oct 10, 2017·0 cites·15 claims
- 5042US11422058B2Digital laser holography-based rapid lens center offset detection deviceGUANGZHOU BOSMA CORP·Filed 2018·Granted Aug 23, 2022·0 cites·6 claims
Showing the top 50 of 54 patent records by PatentIndex Score.
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