Inventor · disambiguated record
Hugo Silva
Also filed as: SILVA HUGO · SILVA HUGO HUMBERTO PLÁCIDO DA
5 granted patents·4 pending applications·45 citations·filing 2009–2023
76Inventor score
Top patents by PatentIndex Score
9 records- 0187US9587312B2Gas inlet member of a CVD reactorSILVA HUGO·Filed 2012·Granted Mar 7, 2017·22 cites·13 claims
- 0287US9159608B2Method for forming TiSiN thin film layer by using atomic layer depositionAIXTRON SE·Filed 2013·Granted Oct 13, 2015·16 cites·7 claims
- 0371US9603556B2Device and method for continuous biometric recognition based on electrocardiographic signalsINST SUPERIOR TECNICO·Filed 2013·Granted Mar 28, 2017·7 cites·10 claims
- 0454US2010012036A1Isolation for multi-single-wafer processing apparatusSILVA HUGO·Filed 2009·Application pending·0 cites
- 0547US10526705B2Methods for controlling the substrate temperature using a plurality of flushing gasesAIXTRON SE·Filed 2018·Granted Jan 7, 2020·0 cites·3 claims
- 0647US2025352125A1Unobtrusive method and device for seizure detectionINST SUPERIOR TECNICO·Filed 2023·Application pending·0 cites
- 0744US2014287142A1Cvd reactor and substrate holder for a cvd reactorAIXTRON SE·Filed 2012·Application pending·0 cites
- 0841US10273580B2Heating deviceAIXTRON SE·Filed 2014·Granted Apr 30, 2019·0 cites·16 claims
- 0940US2016333479A1Apparatus and method for regulating the temperature in a process chamber of a cvd reactor using two temperature sensor devicesAIXTRON SE·Filed 2014·Application pending·0 cites
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