Inventor · disambiguated record

Greg Siu

Also filed as: SIU GREG

1 granted patent·16 citations·filing 2013–2013

37Inventor score

Technology areasH10P

Files withAIXTRON SE1

Top patents by PatentIndex Score

1 record

0187US9159608B2Method for forming TiSiN thin film layer by using atomic layer depositionAIXTRON SE·Filed 2013·Granted Oct 13, 2015·16 cites·7 claims

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