Inventor · disambiguated record
Andre Bresan
Also filed as: BRESAN ANDRE
3 granted patents·18 citations·filing 2008–2013
67Inventor score
Top patents by PatentIndex Score
3 records- 0185US9541685B2Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this typeZEISS CARL LASER OPTICS GMBH·Filed 2013·Granted Jan 10, 2017·10 cites·16 claims
- 0277US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 0369US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
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