Inventor · disambiguated record
Siegfried Rennon
Also filed as: RENNON SIEGFRIED
4 granted patents·2 pending applications·10 citations·filing 2008–2015
68Inventor score
Top patents by PatentIndex Score
6 records- 0177US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 0269US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
- 0365US9921483B2Surface correction of mirrors with decoupling coatingZEISS CARL SMT GMBH·Filed 2015·Granted Mar 20, 2018·1 cites·20 claims
- 0461US2010007866A1Method for producing facet mirrors and projection exposure apparatusZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0558US8693098B2Projection objective for a microlithographic EUV projection exposure apparatusRENNON SIEGFRIED·Filed 2010·Granted Apr 8, 2014·1 cites·14 claims
- 0651US2013100426A1Method for producing facet mirrors and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2012·Application pending·0 cites
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