Inventor · disambiguated record
Eva Kalchbrenner
Also filed as: KALCHBRENNER EVA
2 granted patents·8 citations·filing 2008–2010
55Inventor score
Top patents by PatentIndex Score
2 records- 0177US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 0269US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
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