Inventor · disambiguated record
Andrew Lui
Also filed as: LUI ANDREW · LUI ANDREW L
9 granted patents·2 pending applications·368 citations·filing 1988–2022
89Inventor score
Top patents by PatentIndex Score
11 records- 0193US6815362B1End point determination of process residues in wafer-less auto clean process using optical emission spectroscopyLAM RES CORP·Filed 2002·Granted Nov 9, 2004·71 cites·15 claims
- 0290US7672747B2Recipe-and-component control module and methods thereofLAM RES CORP·Filed 2007·Granted Mar 2, 2010·16 cites·15 claims
- 0388US10921759B2Computer system and method for monitoring key performance indicators (KPIs) online using time series pattern modelASPEN TECH INC·Filed 2017·Granted Feb 16, 2021·5 cites·23 claims
- 0486US5008810ASystem for displaying different subsets of screen views, entering different amount of information, and determining correctness of input dependent upon current user inputPROCESS MODELING INVESTMENT CO·Filed 1988·Granted Apr 16, 1991·202 cites·20 claims
- 0584US6526355B1Integrated full wavelength spectrometer for wafer processingLAM RES CORP·Filed 2000·Granted Feb 25, 2003·23 cites·6 claims
- 0682US7356580B1Plug and play sensor integration for a process moduleLAM RES CORP·Filed 2000·Granted Apr 8, 2008·37 cites·11 claims
- 0769US6855567B1Etch endpoint detectionLAM RES CORP·Filed 2000·Granted Feb 15, 2005·13 cites·15 claims
- 0861US8295963B2Methods for performing data management for a recipe-and-component control moduleHUANG CHUNG-HO·Filed 2010·Granted Oct 23, 2012·1 cites·17 claims
- 0958US2023390693A1Adsorptive gas separation process and system using third component adsorption to drive desorption of purified first component in rapid cycling gas separation devicesSVANTE INC·Filed 2022·Application pending·0 cites
- 1040US2004235303A1Endpoint determination of process residues in wafer-less auto clean process using optical emission spectroscopyLAM RES CORP·Filed 2004·Application pending·0 cites
- 1139US7558641B2Recipe report card framework and methods thereofLAM RES CORP·Filed 2007·Granted Jul 7, 2009·0 cites·24 claims
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