Inventor · disambiguated record
Yoshihiro Tezuka
Also filed as: TEZUKA YOSHIHIRO
11 granted patents·2 pending applications·114 citations·filing 1997–2023
89Inventor score
Files withINTEL CORP7TOKYO ELECTRON LTD2DAINIPPON PRINTING CO LTD1HONDA MOTOR CO LTD1RENESAS TECH CORP1
Top patents by PatentIndex Score
13 records- 0190US7630068B2Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the sameRENESAS TECH CORP·Filed 2007·Granted Dec 8, 2009·17 cites·2 claims
- 0286US7005649B1Mask blanks inspection method and mask blank inspection toolINTEL CORP·Filed 2004·Granted Feb 28, 2006·25 cites·14 claims
- 0376US7220969B2Mask blanks inspection toolINTEL CORP·Filed 2005·Granted May 22, 2007·4 cites·20 claims
- 0474US7679731B2Detecting and characterizing mask blank defects using angular distribution of scattered lightINTEL CORP·Filed 2005·Granted Mar 16, 2010·4 cites·27 claims
- 0568US5942282AMethod for depositing a titanium filmTOKYO ELECTRON LTD·Filed 1998·Granted Aug 24, 1999·36 cites·2 claims
- 0664US11815810B2Measurement tool and methods for EUV lithography masksINTEL CORP·Filed 2021·Granted Nov 14, 2023·0 cites·20 claims
- 0763US2025164871A1Methods and apparatus to improve detection of defects in photomask blanksINTEL CORP·Filed 2023·Application pending·0 cites
- 0857US12032298B2Measurement tool and method for lithography masksINTEL CORP·Filed 2021·Granted Jul 9, 2024·0 cites·19 claims
- 0953US6210843B1Modulation of peripheral critical dimension on photomask with differential electron beam doseINTEL CORP·Filed 1999·Granted Apr 3, 2001·15 cites·20 claims
- 1051US6979408B2Method and apparatus for photomask fabricationDAINIPPON PRINTING CO LTD·Filed 2002·Granted Dec 27, 2005·2 cites·25 claims
- 1148US2006027325A1Method and apparatus for photomask fabricationTEZUKA YOSHIHIRO·Filed 2005·Application pending·0 cites
- 1242US6004872AMethod of manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 1997·Granted Dec 21, 1999·8 cites·5 claims
- 1331US6250268B1Cam chain guide attachment structureHONDA MOTOR CO LTD·Filed 1999·Granted Jun 26, 2001·3 cites·18 claims
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