Inventor · disambiguated record
Kiyoshi Nashimoto
Also filed as: NASHIMOTO KIYOSHI
4 granted patents·82 citations·filing 1991–2002
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0166US6785115B2Electrostatic chuck and substrate processing apparatusNGK INSULATORS LTD·Filed 2002·Granted Aug 31, 2004·11 cites·4 claims
- 0264US5147498AApparatus for controlling temperature in the processing of a substrateANELVA CORP·Filed 1991·Granted Sep 15, 1992·38 cites·10 claims
- 0350US5334251AMethod of and apparatus for controlling temperature in the processing of a substrateANELVA CORP·Filed 1992·Granted Aug 2, 1994·21 cites·7 claims
- 0445US5956616AMethod of depositing thin films by plasma-enhanced chemical vapor depositionANELVA CORP·Filed 1997·Granted Sep 21, 1999·12 cites·14 claims
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